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Lead / Principal Research Engineer (Lithography) (APM), IME

A*STAR Research
MI Full Time
POSTED ON 3/4/2025
AVAILABLE BEFORE 6/2/2025

Lead / Principal Research Engineer (Lithography) (APM), IME

Posting Date : 24 Feb 2025 | Closing Date : 25 Apr 2025

Job Description :

  • Leading central lithography team under pattern transfer group.
  • Selection, procurement and qualification of litho tool sets based on program from contact aligner to immersion.
  • Actively working with cross functional stake owners to plan and develop new lithography process.
  • Validate design, reticle tap out and post tap out verification.
  • Assist in internal and external technical discussion to overcome process related challenges and provide relevant solutions.
  • Perform process characterization, margin study to determine the process capability of new process platform.
  • Act as a subject matter expert and resource for researchers and industry partners to enable process and / or product realization.
  • Publish process development outcomes and breakthroughs in the research community.
  • Engage with relevant equipment makers / vendors and be responsible for selecting and procuring research equipment.
  • Work with fab team in establishing SPC for newly developed processes.

Requirements :

  • Ph.D / Master / Bachelor Degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, Chemistry, and Microelectronics, or closely related fields are welcome to apply.
  • More than 10 years of relevant working experience in R&D and / or industry environment with broad exposure in handling 6”, 8” and / or 12” substrates covering nano to micron tech nodes, preferably experience in SiC / GaN / Photonics.
  • Proficient in Photolithography tools including Immersion / KrF / I-line Scanner / Stepper / Mask Aligner; knowledge in EBEAM Lithography tool will be an added advantage.
  • Hands-on experience in metrology including but not limited to CDSEM, Overlay, OCD, DRSEM, Microscope. Capable of creating recipes to support various research requirements.
  • Knowledge in design and simulation (Prolith, OPC, etc.), reticle layout (oas, gds) review and basic tap out process.
  • Equipped with Lithography skill set including fundamental Lithography theory, Photoresist characteristics and applications, new process setup (swing curve, FEM, DOE, statistical root cause analysis and problem-solving methods, etc.), optimization and margin improvement.
  • Relevant hardware and application knowledge in Lithography tools and metrology.
  • Possess good interpersonal and oral / written communication skills, with ability to deliver clear and concise messages to both internal and external stakeholders.
  • The above eligibility criteria are not exhaustive. A

  • STAR may include additional selection criteria based on its prevailing recruitment policies. These policies may be amended from time to time without notice. We regret that only shortlisted candidates will be notified.
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