Mathematics/physics internship: improved contamination detection

Introduction

In ASML, there is a continuous drive to reduce cycle time and maintain high yield on EUV scanners. The Expose Intrafield Setup (EIS) team performs critical tests for machine calibration. While these tests primarily serve to ensure machine accuracy, they also present an opportunity for early detection of contamination on the reticle or reticle clamp – an issue that can severely affect scanner performance if not identified early.

This assignment aims to improve contamination detection by analyzing large volumes of test data, developing advanced detection algorithms, and potentially designing an optimized measurement layout. The trainee will work alongside the EIS team and will interact with various stakeholders involved in EUV metrology, customer support, and system performance.

Your assignment

As a trainee working within EIS team, you will be responsible for investigating, prototyping, and validating a new contamination detection approach that leverages existing calibration test. This improved method should enable more accurate detection, helping to maintain optimal scanner performance.

The assignment is divided into three stages:

1. Familiarize with the calibration process and existing data

• Understand the current calibration workflow and how contamination is detected with existing setup.

• Explore historical data (both contaminated and non-contaminated cases) to identify key parameters or patterns indicative of contamination.

2. Implement prototype in MATLAB (and Python if applicable)

• Develop a model that applies suitable algorithms (e.g., classification, anomaly detection, or regression) for contamination detection.

• Validate the model using existing datasets to measure accuracy, and robustness.

• Compare your results against current detection method to assess potential improvements.

3. Propose an optimized measurement layout (stretch goal)

• If time permits, design a conceptual measurement layout that focuses on contamination detection without needing the full calibration procedure.

• Evaluate trade-offs between number of measurements, detection accuracy.

Your profile

To be a match for this internship, you:

• Are a master student in math, physics, computer science, optics, engineering (e.g., Electrical, Mechanical, Software, Control Systems).

• Are rigorous, autonomous, and analytical-oriented and have good understanding of linear algebra and math.

• Have good knowledge of MATLAB.

• Have good communication and writing skills in English.

• Have good technical communication skills for different kind of audiences (from technical experts to more generic audience).

This is a Master apprentice or graduation internship for a minimum of 6 months, for 4 to 5 days per week (at least 3 days onsite). The start date of this internship is around June.

Other requirements you need to meet

• You are enrolled at an educational institute for the entire duration of the internship;

• You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate;

• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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